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Title, Foundations of MEMS ; Author, Chang Liu ; Publisher, Pearson Education Asia, 2012 ; ISBN, 8131764753, 9788131764756 ; Length, 576 pages. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience.Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience.